Reference temperature sensor for TMOS-based thermal detectors

This paper presents a temperature sensor system providing the reference of TMOS-based thermal detectors, in order to enable contactless absolute measurements. The proposed directly employs few pixels TMOS detector as sensing element, thus detecting local temperature, while readout circuit is integrated on separate chip. features two-phase time-domain architecture, which provides biasing element by alternatively switching between two different bias current values subsequent phases. reading converted digital domain thanks switched-capacitor 1-bit second-order sigma-delta (ΣΔ) analog-to-digital converter (ADC). was fabricated 130-nm CMOS process and extensively characterized through measurements, together with detector, realized SOI technology bonded same package. system, burning 10.8-μW power, 97-mK resolution when considering 4096-ms conversion time 0.13°C peak-to-peak inaccuracy after three point calibration 15–40°C range, satisfying characteristics for human body